EP3899662
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
:
EP einkaleyfi: Þýðing ekki lögð inn:
14.11.2019:
1.6.2022:
19801044.9
:
13.11.2039
:
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
14.11.2019
1.6.2022
:
ASML Netherlands B.V.:
P.O. Box 324, 5500 AH Veldhoven, NL
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BRANTJES, Nicolaas Petrus Marcus:
5500 AH Veldhoven, NL
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COX, Matthijs:
5500 AH Veldhoven, NL
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MENCHTCHIKOV, Boris:
San Jose, CA 95131, US
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TABERY, Cyrus, Emil:
San Jose, CA 95131, US
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ZHANG, Youping:
San Jose, CA 95131, US
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ZOU, Yi:
San Jose, CA 95131, US
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LIN, Chenxi:
San Jose, CA 95131, US
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CHENG, Yana:
San Jose, CA 95131, US
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HASTINGS, Simon, Philip, Spencer:
San Jose, CA 95131, US
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GENIN, Maxime, Philippe, Frederic:
San Jose, CA 95131, US
:
18214013:
19.12.2018:
EP
:
201962802866 P:
8.2.2019:
US
:
EP2019081282:
14.11.2019
:
G03F 7/20, G03F 9/00