EP2878940

MEMS pressure sensor field shield layout for surface charge immunity in oil filled packaging

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    EP einkaleyfi: Þýðing ekki lögð inn
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    14.11.2014
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    26.2.2020
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    14193354.9
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    13.11.2034
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    MEMS pressure sensor field shield layout for surface charge immunity in oil filled packaging

14.11.2014
26.2.2020
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    Sensata Technologies, Inc.
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    529 Pleasant Street, Attleboro, MA 02703, US
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    McNeal, Mark P.
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    Northborough, MA Massachusetts 01532, US
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    Strott, Douglas B.
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    Andover, MA Massachusetts 01810, US
  • :
    Greene, Stephen P.
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    N. Scituate, RI Rhode Island 02857, US
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    201314082562
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    18.11.2013
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    US
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    G01L 9/00, G01L 19/06