EP2555234
Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp
:
EP einkaleyfi: Þýðing ekki lögð inn:
6.6.2012:
19.8.2020:
12171001.6
:
5.6.2032
:
Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp
6.6.2012
19.8.2020
:
ASML Holding N.V.:
De Run 6501, 5504 DR Veldhoven, NL
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Helmus, Peter:
New Milford, CT 6776, US
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Wilklow, Ronald:
Fairfield, CT 6824, US
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Deng, Jianguo:
Wilton CT 06897, US
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201161514320 P:
2.8.2011:
US
:
G03F 7/20, H01L 21/683