EP2555234

Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

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    EP einkaleyfi: Þýðing ekki lögð inn
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    6.6.2012
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    19.8.2020
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    12171001.6
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    5.6.2032
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    Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

6.6.2012
19.8.2020
  • :
    ASML Holding N.V.
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    De Run 6501, 5504 DR Veldhoven, NL
  • :
    Helmus, Peter
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    New Milford, CT 6776, US
  • :
    Wilklow, Ronald
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    Fairfield, CT 6824, US
  • :
    Deng, Jianguo
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    Wilton CT 06897, US
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    201161514320 P
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    2.8.2011
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    US
  • :
    G03F 7/20, H01L 21/683