EP2309559
Piezoelectric actuating structure comprising an integrated piezoresistive strain gauge and manufacturing method thereof
:
EP einkaleyfi: Þýðing ekki lögð inn:
4.10.2010:
29.5.2013:
10186357.9
:
3.10.2030
:
Piezoelectric actuating structure comprising an integrated piezoresistive strain gauge and manufacturing method thereof
4.10.2010
29.5.2013
:
Commissariat à l'Énergie Atomique et aux Énergies Alternatives:
Bâtiment "Le Ponant D" 25, rue Leblanc, 75015, Paris, FR
:
Cueff, Matthieu:
GRENOBLE, FR
:
Defay, Emmanuel:
VOREPPE, FR
:
Perruchot, François:
GRENOBLE, FR
:
Rey, Patrice:
SAINT JEAN DE MOIRANS, FR
:
0904774:
6.10.2009:
FR
:
H01L 41/314, H01L 41/29, H01L 41/09, H01L 41/332, H01L 41/047