EP2304769
METHOD FOR AUTOMATIC MEASUREMENT AND FOR TEACHING-IN OF LOCATION POSITIONS OF OBJECTS WITHIN A SUBSTRATE PROCESSING SYSTEM BY MEANS OF SENSOR CARRIERS AND ASSOCIATED SENSOR CARRIER
:
EP einkaleyfi: Þýðing ekki lögð inn:
9.4.2010:
27.11.2013:
10714188.9
:
8.4.2030
:
METHOD FOR AUTOMATIC MEASUREMENT AND FOR TEACHING-IN OF LOCATION POSITIONS OF OBJECTS WITHIN A SUBSTRATE PROCESSING SYSTEM BY MEANS OF SENSOR CARRIERS AND ASSOCIATED SENSOR CARRIER
9.4.2010
27.11.2013
:
Aes Motomation GmbH:
Nikolaus-Otto-Strasse 8, 40670, Meerbusch, DE
:
HERTGENS, Andreas:
Korschenbroich, DE
:
MUELLER, Torsten:
Kerken, DE
:
WALTNER, Paul:
Meerbusch, DE
:
102009016811:
9.4.2009:
DE
:
WO2010115632:
9.4.2010
:
H01L 21/67, H01L 21/68